Güvenç,B.A.Necipoǧlu,S.Demirel,B.Güvenç,L.2024-05-252024-05-2520130978-184821308-110.1002/9781118614549.ch42-s2.0-84886973772https://doi.org/10.1002/9781118614549.ch4https://hdl.handle.net/20.500.14517/2292The atomic force microscope (AFM) is an instrument used for acquiring images at nanometer scale. Obtaining better image quality at higher scan speed is a research area of great interest in the control of an AFM. Improving the dynamic response of the scanning probe in the vertical direction and the dynamic response of the scanning motion in the lateral plane are the two major areas of application of advanced control methods to an AFM. The uncertainties inherent in the models of AFM vertical and lateral direction motion stages dictates the application of robust control methods. In this chapter, robust control methods are applied to AFM, treating first the vertical direction and then the lateral plane. ©2011 ISTE Ltd.eninfo:eu-repo/semantics/closedAccessAFM imagingAFM robust controlMIMO disturbanceTapping mode AFMVertical directionBook Part103132