Robust control of atomic force microscopy

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dc.authorscopusid7004242785
dc.authorscopusid27267908500
dc.authorscopusid57016447200
dc.authorscopusid6701499807
dc.contributor.authorGüvenç,B.A.
dc.contributor.authorNecipoǧlu,S.
dc.contributor.authorDemirel,B.
dc.contributor.authorGüvenç,L.
dc.date.accessioned2024-05-25T12:31:28Z
dc.date.available2024-05-25T12:31:28Z
dc.date.issued2013
dc.departmentOkan Universityen_US
dc.department-tempGüvenç B.A., Department of Mechanical Engineering, School of Engineering and Architecture, Okan University, Istanbul, Tuzla Campus, Turkey; Necipoǧlu S., Mekar Mechatronics Research Labs, Department of Mechanical Engineering, Istanbul Technical University, Istanbul, Turkey; Demirel B., School of Electrical Engineering, KTH Royal Institute of Technology, Stockholm, Sweden; Güvenç L., Department of Mechanical Engineering, School of Engineering and Architecture, Okan University, Istanbul, Tuzla Campus, Turkeyen_US
dc.description.abstractThe atomic force microscope (AFM) is an instrument used for acquiring images at nanometer scale. Obtaining better image quality at higher scan speed is a research area of great interest in the control of an AFM. Improving the dynamic response of the scanning probe in the vertical direction and the dynamic response of the scanning motion in the lateral plane are the two major areas of application of advanced control methods to an AFM. The uncertainties inherent in the models of AFM vertical and lateral direction motion stages dictates the application of robust control methods. In this chapter, robust control methods are applied to AFM, treating first the vertical direction and then the lateral plane. ©2011 ISTE Ltd.en_US
dc.identifier.citation0
dc.identifier.doi10.1002/9781118614549.ch4
dc.identifier.endpage132en_US
dc.identifier.isbn978-184821308-1
dc.identifier.scopus2-s2.0-84886973772
dc.identifier.startpage103en_US
dc.identifier.urihttps://doi.org/10.1002/9781118614549.ch4
dc.identifier.urihttps://hdl.handle.net/20.500.14517/2292
dc.language.isoen
dc.publisherJohn Wiley and Sonsen_US
dc.relation.ispartofMechatronicsen_US
dc.relation.publicationcategoryKitap Bölümü - Uluslararasıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectAFM imagingen_US
dc.subjectAFM robust controlen_US
dc.subjectMIMO disturbanceen_US
dc.subjectTapping mode AFMen_US
dc.subjectVertical directionen_US
dc.titleRobust control of atomic force microscopyen_US
dc.typeBook Parten_US
dspace.entity.typePublication

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